ServicenavigationHauptnavigationTrailKarteikarten

Research unit
INNOSUISSE
Project number
10710.1;8 PFNM-NM
Project title
SEM integrated gas injection system for local three dimensional focused electron and ion beam CVD at nanometre scale
Project status Finished
 
Start date 01.12.2009
End date 11.06.2013
 
Granted total costs 518'000.00  CHF
Section 22 Förderbereich Nano / Micro
Project category Project
Research type Applied research and development
NABS classification Non divisible / inclassable research
 
Research disciplines
100 % T120 Systems engineering, computer technology
Last modification of the project
27.11.2014