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Research unit
INNOSUISSE
Project number
9758.1;5 PFNM-NM
Project title
Simulation of sealing properties of vacuum components by characterisation of sealing surfaces
Project status Finished
 
Start date 01.09.2008
End date 25.05.2011
 
Granted total costs 580'000.00  CHF
Section 22 Förderbereich Nano / Micro
Project category Project
Research type Applied research and development
NABS classification Non divisible / inclassable research
 
Research disciplines
100 % T171 Microelectronics

Last modification of the project
27.11.2014