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Research unit
INNOSUISSE
Project number
9829.1;5 PFNM-NM
Project title
MEMS oscillator : development of a precise, low frequency and low power time base in MEMS technology on silicon
Project status Finished
 
Start date 01.12.2008
End date 22.10.2013
 
Granted total costs 438'250.00  CHF
Section 22 Förderbereich Nano / Micro
Project category Project
Research type Applied research and development
NABS classification Non divisible / inclassable research
 
Research disciplines
100 % T171 Microelectronics

Last modification of the project
27.11.2014