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Research unit
INNOSUISSE
Project number
7809.2;6 NMPP-NM
Project title
High speed scanning interferometer for 5nm precision gap control on multilayered substrates
Project status Finished
 
Start date 01.05.2006
End date 05.05.2010
 
Granted total costs 232'540.00  CHF
Section 22 Förderbereich Nano / Micro
Project category Project
Research type Applied research and development
NABS classification Non divisible / inclassable research
 
Research disciplines
100 % T171 Microelectronics
Last modification of the project
27.11.2014