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Research unit
INNOSUISSE
Project number
6959.2;7 EPRP-IW
Project title
Performance Improvement of Novel LIGA resist Using different techniques
Project status Finished
 
Start date 01.07.2004
End date 12.03.2007
 
Granted total costs 173'000.00  CHF
Section 23 Förderbereich Engineering
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % T150 Material technology

Last modification of the project
27.11.2014