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Research unit
INNOSUISSE
Project number
6654.1;3 NMS-NM
Project title
Micro jet perturbation reduction by etched high-pressure nozzles aiming reduction of street-width in chip-singulation by water-jet guided laser cutting
Project status Finished
 
Start date 01.09.2003
End date 23.05.2012
 
Granted total costs 168'000.00  CHF
Section 17 TOP NANO
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % T171 Microelectronics
Last modification of the project
27.11.2014