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Research unit
METAS
Project number
115.02.FP.011
Project title
Development of 3D measuring possibilities in microtechnology
Project status Finished
 
Start date 01.12.2002
End date 30.06.2005
 
Section 5111 Length, Nano- and Micro-technology
Project category Project
Research type Experimental development
NABS classification Industrial production and technology
 
Research disciplines
100 % P180 Metrology, physical instrumentation
Last modification of the project
12.02.2007