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Research unit
INNOSUISSE
Project number
5553.2;7 TNS-NM
Project title
Low impurity deposition surfaces for liquid flow applications
Project status Finished
 
Start date 01.12.2001
End date 16.08.2006
 
Granted total costs 100'000.00  CHF
Section 17 TOP NANO
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % T171 Microelectronics

Last modification of the project
27.11.2014