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Research unit
INNOSUISSE
Project number
3651.1;3 KTS
Project title
SHA-08 - optical lithography tool for the next centry
Project status Finished
 
Start date 01.01.1998
End date 03.07.2003
 
Granted total costs 320'000.00  CHF
Section 5 CTI
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % Not yet defined
Last modification of the project
27.11.2014