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Research unit
INNOSUISSE
Project number
10705.2;7 PFNM-NM
Project title
The project Bubble Detection (hereafter named BUD) aims at developing a sensor detecting bubbles to be integrated into an existing flowmeter for semiconductor applications

Participants

Research organisation: Innosuisse
Swiss Innovation Agency
Einsteinstrasse 2
CH-3003 Bern
+41 58 461 61 61 (Call Center)
info@innosuisse.ch
www.innosuisse.ch/
Contact person

 Jens Krauss
CSEM Centre Suisse d'Electronique
et de Microtechnique
Rue Jaquet-Droz 1
CH-2007 Neuchâtel
032 720 5546
jens.krauss@csem.ch